Publication:

New bending mode in SAQP Si fins and its mitigation

Date

2022

Journal article

https://doi.org/10.1016/j.mssp.2021.106437

Simple item page Full metadata Statistics

Author(s)

Sepulveda Marquez, Alfonso

;

;

;

;

;

Baudot, Sylvain

;

Briggs, Basoene

;

;

;

;

Altamirano Sanchez, Efrain

Journal

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Statistics

1438 since deposited on 2023-06-20

5last month

2last week

Acq. date: 2026-02-27