dc.contributor.author | Claeys, Cor | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Poyai, Amporn | |
dc.contributor.author | Hayama, Kiyoteru | |
dc.contributor.author | Kobayashi, K. | |
dc.contributor.author | Ohyama, Hidenori | |
dc.contributor.author | Mohammadzadeh, A. | |
dc.date.accessioned | 2023-11-02T10:34:38Z | |
dc.date.available | 2021-10-14T12:44:27Z | |
dc.date.available | 2023-11-02T10:34:38Z | |
dc.date.issued | 2000 | |
dc.identifier.issn | na | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4199.2 | |
dc.source | IIOimport | |
dc.title | Radiation performance of shallow trench isolation | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.date.embargo | 9999-12-31 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | no | |
dc.source.beginpage | 19 | |
dc.source.endpage | 24 | |
dc.source.conference | Proceedings of the 4th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications | |
dc.source.conferencedate | 11/10/2000 | |
dc.source.conferencelocation | Japan | |
dc.source.journal | na | |
imec.availability | Published - imec | |