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Radiation performance of shallow trench isolation

dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.authorPoyai, Amporn
dc.contributor.authorHayama, Kiyoteru
dc.contributor.authorKobayashi, K.
dc.contributor.authorOhyama, Hidenori
dc.contributor.authorMohammadzadeh, A.
dc.date.accessioned2023-11-02T10:34:38Z
dc.date.available2021-10-14T12:44:27Z
dc.date.available2023-11-02T10:34:38Z
dc.date.issued2000
dc.identifier.issnna
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4199.2
dc.sourceIIOimport
dc.titleRadiation performance of shallow trench isolation
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.numberofpages6
dc.source.peerreviewno
dc.source.beginpage19
dc.source.endpage24
dc.source.conferenceProceedings of the 4th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications
dc.source.conferencedate11/10/2000
dc.source.conferencelocationJapan
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/4199.2*2023-06-29T09:01:42Zvalidation by library/open access desk
120.500.12860/41992021-10-14T12:44:27Z

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