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Radiation performance of shallow trench isolation
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Authors
Claeys, Cor
;
Simoen, Eddy
;
Poyai, Amporn
;
Hayama, Kiyoteru
;
Kobayashi, K.
;
Ohyama, Hidenori
;
Mohammadzadeh, A.
ISSN
na
Conference
Proceedings of the 4th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications
Journal
na
Title
Radiation performance of shallow trench isolation
Publication type
Proceedings paper
Embargo date
9999-12-31
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Date
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2
20.500.12860/4199.2
*
2023-06-29T09:01:42Z
validation by library/open access desk
1
20.500.12860/4199
2021-10-14T12:44:27Z
*Selected version
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