Notice

This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/4199.2

Show simple item record

Radiation performance of shallow trench isolation

dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.authorPoyai, Amporn
dc.contributor.authorHayama, Kiyoteru
dc.contributor.authorKobayashi, K.
dc.contributor.authorOhyama, Hidenori
dc.contributor.authorMohammadzadeh, A.
dc.date.accessioned2021-10-14T12:44:27Z
dc.date.available2021-10-14T12:44:27Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4199
dc.sourceIIOimport
dc.titleRadiation performance of shallow trench isolation
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage19
dc.source.endpage24
dc.source.conferenceProceedings of the 4th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications
dc.source.conferencedate11/10/2000
dc.source.conferencelocationJapan
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
4178.pdf
Size:
564.5Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
220.500.12860/4199.22023-06-29T09:01:42Zvalidation by library/open access desk
120.500.12860/4199*2021-10-14T12:44:27Z

*Selected version