Publication:

Challenges for spacer and source/drain cavity patterning in CFET devices

Date

2023-05-16
Proceedings Paper
https://doi.org/http://dx.doi.org/10.1117/12.2658073
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Accepted version 1.32 MB

Author(s)

Mannaert, Geert  
;
Mertens, Hans  
;
Hosseini, Maryam  
;
Demuynck, Steven  
;
Nguyen, Vy Thi Hoang  
;
Chan, BT  
;
Lazzarino, Frederic  

Journal

Proceedings of SPIE; Vol. 12499

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250 since deposited on 2023-06-26
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