Publication:
Challenges for spacer and source/drain cavity patterning in CFET devices
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Acq. date: 2026-01-10
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382 since deposited on 2023-06-26
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184 since deposited on 2023-06-26
19last month
4last week
Acq. date: 2026-01-10
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382 since deposited on 2023-06-26
Acq. date: 2026-01-10
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