dc.contributor.author | Vici, Andrea | |
dc.contributor.author | Degraeve, Robin | |
dc.contributor.author | Roussel, Philippe | |
dc.contributor.author | Franco, Jacopo | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2024-03-28T08:50:30Z | |
dc.date.available | 2023-07-15T17:05:32Z | |
dc.date.available | 2024-03-28T08:50:30Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 1541-7026 | |
dc.identifier.other | WOS:001007431500090 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42155.2 | |
dc.source | WOS | |
dc.title | Analysis of TDDB lifetime projection in low thermal budget HfO2/SiO2 stacks for sequential 3D integrations | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vici, Andrea | |
dc.contributor.imecauthor | Degraeve, Robin | |
dc.contributor.imecauthor | Roussel, Philippe | |
dc.contributor.imecauthor | Franco, Jacopo | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | Vici, Andrea::0000-0002-3614-9590 | |
dc.contributor.orcidimec | Degraeve, Robin::0000-0002-4609-5573 | |
dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
dc.contributor.orcidimec | Franco, Jacopo::0000-0002-7382-8605 | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.identifier.doi | 10.1109/IRPS48203.2023.10117955 | |
dc.identifier.eisbn | 978-1-6654-5672-2 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.conference | 61st IEEE International Reliability Physics Symposium (IRPS) | |
dc.source.conferencedate | MAR 26-30, 2023 | |
dc.source.conferencelocation | Monterey | |
dc.source.journal | N/A | |
imec.availability | Published - imec | |