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Analysis of TDDB lifetime projection in low thermal budget HfO2/SiO2 stacks for sequential 3D integrations
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Authors
Vici, Andrea
;
Degraeve, Robin
;
Roussel, Philippe
;
Franco, Jacopo
;
Kaczer, Ben
;
De Wolf, Ingrid
DOI
10.1109/IRPS48203.2023.10117955
EISBN
978-1-6654-5672-2
ISSN
1541-7026
Conference
61st IEEE International Reliability Physics Symposium (IRPS)
Journal
N/A
Title
Analysis of TDDB lifetime projection in low thermal budget HfO2/SiO2 stacks for sequential 3D integrations
Publication type
Proceedings paper
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2
20.500.12860/42155.2
*
2024-03-28T08:47:37Z
validation by library/open access desk
1
20.500.12860/42155
2023-07-15T17:05:32Z
*Selected version
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