Publication:

Scaled-down deposited underlayers for EUV lithography

Date

2023

Proceedings Paper

https://doi.org/10.1117/12.2660376

Simple item page Full metadata Statistics

Author(s)

;

Afonso, Joao Antunes

;

Bezard, Philippe

;

;

Fallica, Roberto

;

;

;

De Simone, Danilo

;

;

;

Fukuda, Hideaki

;

;

De Roest, David

;

Journal

Proceedings of SPIE

Statistics

896 since deposited on 2023-07-28

Acq. date: 2026-02-27