dc.contributor.author | Shirotori, Akihide | |
dc.contributor.author | Hoshino, Manabu | |
dc.contributor.author | Fujimura, Makoto | |
dc.contributor.author | Yeh, Sin Fu | |
dc.contributor.author | Suh, Hyo Seon | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | Vandenberghe, Geert | |
dc.contributor.author | Sanuki, Hideaki | |
dc.date.accessioned | 2024-04-08T11:56:28Z | |
dc.date.available | 2023-07-28T17:39:56Z | |
dc.date.available | 2024-04-08T11:56:28Z | |
dc.date.issued | 2023 | |
dc.identifier.isbn | 978-1-5106-6103-5 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:001022961000002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42236.2 | |
dc.source | WOS | |
dc.title | Development on main chain scission resists for high-NA EUV lithography | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Suh, Hyo Seon | |
dc.contributor.imecauthor | Vandenberghe, Geert | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.orcidimec | Suh, Hyo Seon::0000-0003-4370-5062 | |
dc.contributor.orcidimec | Vandenberghe, Geert::0009-0001-2424-1322 | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.identifier.doi | 10.1117/12.2657506 | |
dc.identifier.eisbn | 978-1-5106-6104-2 | |
dc.source.numberofpages | 12 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 1249807 | |
dc.source.conference | Conference on Advances in Patterning Materials and Processes XL | |
dc.source.conferencedate | FEB 27-MAR 01, 2023 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12498 | |
imec.availability | Published - imec | |