Publication:

Direct yield prediction from SEM images

Date

2023

Proceedings Paper

https://doi.org/10.1117/12.2658294

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Author(s)

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Linshiz, Jasmine

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Santoro, Gaetano

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Baudot, Sylvain

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Reifsnider, Jason

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Vadakupudhu Palayam, Senthil

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Journal

Proceedings of SPIE

Statistics

763 since deposited on 2023-07-28

Acq. date: 2026-01-25