Publication:

Reduced resistivity of NiAl by backthinning for advanced interconnect metallization

Date

2023
Proceedings Paper
https://doi.org/10.1109/IITC/MAM57687.2023.10154878
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 2.2 MB

Author(s)

Soulie, Jean-Philippe  
;
Tokei, Zsolt  
;
Heylen, Nancy  
;
Adelmann, Christoph  

Journal

IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM)

Abstract

Description

Statistics

Downloads

1 since deposited on 2023-08-07
Acq. date: 2026-02-26

Views

1218 since deposited on 2023-08-07
3last week
Acq. date: 2026-02-26

Citations

Statistics

Downloads

1 since deposited on 2023-08-07
Acq. date: 2026-02-26

Views

1218 since deposited on 2023-08-07
3last week
Acq. date: 2026-02-26

Citations