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Investigating the Metal-plasma Interaction during the Patterning of MgZnO Alloys, used For Compute and Memory Applications

dc.contributor.authorGhorbani, Leila
dc.contributor.authorKundu, Shreya
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2025-05-14T10:34:52Z
dc.date.available2023-08-23T08:46:40Z
dc.date.available2025-05-14T10:34:52Z
dc.date.issued2023-10
dc.identifier.issn2151-2043
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42387.2
dc.titleInvestigating the Metal-plasma Interaction during the Patterning of MgZnO Alloys, used For Compute and Memory Applications
dc.typeMeeting abstract
dc.contributor.imecauthorGhorbani, Leila
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecKundu, Shreya::0000-0001-8052-7774
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo2023-06-20
dc.identifier.doi10.1149/MA2023-02161164mtgabs
dc.source.numberofpages1
dc.source.peerreviewyes
dc.source.beginpage1164
dc.source.conference244th ECS Meeting: PRiME. Meeting D02: Plasma and Thermal Processes for Materials Modification, Synthesis, and Processing 5
dc.source.conferencedate08-12 October 2023
dc.source.conferencelocationGothenburg
dc.source.journalECS Meeting Abstracts, Volume MA2023-02,
imec.availabilityPublished - open access


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