ISSN
2151-2043
Conference
244th ECS Meeting: PRiME. Meeting D02: Plasma and Thermal Processes for Materials Modification, Synthesis, and Processing 5
Journal
ECS Meeting Abstracts, Volume MA2023-02,
Title
Investigating the Metal-plasma Interaction during the Patterning of MgZnO Alloys, used For Compute and Memory Applications
Publication type
Meeting abstract
Embargo date
2023-06-20
