Publication:

Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry Etching

Date

2023-08

Proceedings Paper

https://doi.org/10.4028/p-B71ad1

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Files

Accepted version 3.08 MB

Author(s)

;

Mareum Khan, Muhaimin

;

;

Ray Chowdhuri, Angshuman

;

;

Philipsen, Harold

;

Holsteyns, Frank

;

Mirsaidov, Utkur

Journal

Solid State Phenomena Vol. 346

Statistics

1015 since deposited on 2023-09-06

Acq. date: 2026-02-26