Authors

De Jaeger, Brice; Van den bosch, G.; Van Hove, Marleen; Debusschere, Ingrid; Schaekers, Marc; Badenes, Gonçal

Conference

Proceedings of the 30th European Solid-State Device Research Conference - ESSDERC

Title

Optimisation of a pre-metal-dielectric with a contact etch stop layer for 0.18μm and 0.13μm technologies

Publication type

Proceedings paper

Embargo date

9999-12-31