A detailed study on the growth of thin oxide layers on silicon using ozonated solutions

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Authors

De Smedt, Frank; Vinckier, Chris; Cornelissen, Ingrid; De Gendt, Stefan; Heyns, Marc

Issue

3

Journal

Journal of the Electrochemical Society

Volume

147

Title

A detailed study on the growth of thin oxide layers on silicon using ozonated solutions

Publication type

Journal article

Embargo date

9999-12-31

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