Publication:

Simulation of Cu bulge-out by cyclic Cu surface diffusion FEM in Cu/SiCN hybrid bonding

Date

2023

Proceedings Paper

https://doi.org/10.1109/eurosime56861.2023.10100784

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Author(s)

;

De Messemaeker, Joke

;

Gonzalez, Mario

;

;

;

De Wolf, Ingrid

Journal

N/A

Statistics

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Acq. date: 2026-10-03