Publication:

EUV single patterning validation of curvilinear routing

Date

2023-04-28
Proceedings Paper
https://doi.org/10.1117/12.2654633
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Published version 1.71 MB

Author(s)

Treska, Fergo  
;
Xu, Dongbo  
;
Gillijns, Werner  
;
Sherazi, Yasser  

Journal

Proceedings of SPIE; Vol.12494

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