Authors

Alves Donaton, Ricardo; Iacopi, Francesca; Baklanov, Mikhaïl; Shamiryan, Denis; Coenegrachts, Bart; Struyf, Herbert; Lepage, Muriel; Meuris, Marc; Van Hove, Marleen; Gray, William; Meynen, Herman; De Roest, David; Vanhaelemeersch, Serge; Maex, Karen

Conference

Proceedings of the IEEE 2000 International Interconnect Technology Conference

Title

Physical and electrical characterization of silsesquioxane-based ultra-low k dielectric films

Publication type

Proceedings paper

Embargo date

9999-12-31