Publication:

Physical and electrical characterization of silsesquioxane-based ultra-low k dielectric films

Date

Loading...
Thumbnail Image

Abstract

Description

Metrics

Views

1970 since deposited on 2021-10-14
Acq. date: 2025-10-23

Citations

Metrics

Views

1970 since deposited on 2021-10-14
Acq. date: 2025-10-23

Citations