Publication:

Plasma nitridation for atomic layer etching of Ni

Date

2024

Journal article

https://doi.org/10.1116/6.0003263

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Author(s)

Smith, Taylor G.

;

;

de Marneffe, Jean-Francois

;

Journal

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

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646 since deposited on 2024-02-11

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Acq. date: 2026-04-27