Publication:
Exploring crystal recovery and dopant activation in coated laser annealing on ion implanted 4H-SiC epitaxial layers
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279 since deposited on 2024-03-26
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Acq. date: 2026-03-16
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Statistics
Views
279 since deposited on 2024-03-26
2last month
1last week
Acq. date: 2026-03-16
Citations