Publication:
Impact of vacuum ultraviolet photons on ultrathin polymethylmethacrylate during plasma etching
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Acq. date: 2026-03-17
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66 since deposited on 2024-05-02
10last month
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Acq. date: 2026-03-17
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678 since deposited on 2024-05-02
Acq. date: 2026-03-17
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