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Impact of vacuum ultraviolet photons on ultrathin polymethylmethacrylate during plasma etching

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Acq. date: 2026-08-23

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131 since deposited on 2024-05-02
34last month
6last week
Acq. date: 2026-08-23

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684 since deposited on 2024-05-02
2last month
Acq. date: 2026-08-23

Citations