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Patterning spacer source drain cavities in CFET devices

dc.contributor.authorChoudhury, Subhobroto
dc.contributor.authorMannaert, Geert
dc.contributor.authorPetersen Barbosa Lima, Lucas
dc.contributor.authorDemuynck, Steven
dc.contributor.authorKoo, Il Gyo
dc.contributor.authorLazzarino, Frederic
dc.date.accessioned2025-03-31T13:43:05Z
dc.date.available2024-06-06T18:30:26Z
dc.date.available2025-03-31T13:43:05Z
dc.date.issued2024
dc.identifier.isbn978-1-5106-7222-2
dc.identifier.issn0277-786X
dc.identifier.otherWOS:001223585400003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43993.2
dc.sourceWOS
dc.titlePatterning spacer source drain cavities in CFET devices
dc.typeProceedings paper
dc.contributor.imecauthorChoudhury, Subhobroto
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorPetersen Barbosa Lima, Lucas
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorKoo, Il Gyo
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.orcidimecChoudhury, Subhobroto::0009-0000-1138-938X
dc.contributor.orcidimecMannaert, Geert::0009-0003-1267-5355
dc.contributor.orcidimecPetersen Barbosa Lima, Lucas::0009-0003-5700-7553
dc.contributor.orcidimecKoo, Il Gyo::0009-0009-4534-2980
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.identifier.doi10.1117/12.3013077
dc.identifier.eisbn978-1-5106-7223-9
dc.source.numberofpages6
dc.source.peerreviewyes
dc.source.beginpageArt. 1295805
dc.source.conferenceConference on Advanced Etch Technology and Process Integration for Nanopatterning XIII
dc.source.conferencedateFEB 26-29, 2024
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.volume12958
imec.availabilityPublished - imec


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220.500.12860/43993.2*2025-03-31T13:36:19Zvalidation by library/open access desk
120.500.12860/439932024-06-06T18:30:26Z

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