Patterning spacer source drain cavities in CFET devices

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Authors
Choudhury, Subhobroto; Mannaert, Geert; Petersen Barbosa Lima, Lucas; Demuynck, Steven; Koo, Il Gyo; Lazzarino, Frederic
DOI
10.1117/12.3013077
EISBN
978-1-5106-7223-9
ISBN
978-1-5106-7222-2
ISSN
0277-786X
Conference
Conference on Advanced Etch Technology and Process Integration for Nanopatterning XIII
Journal
Proceedings of SPIE
Volume
12958
Title
Patterning spacer source drain cavities in CFET devices
Publication type
Proceedings paper
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220.500.12860/43993.2*2025-03-31T13:36:19Zvalidation by library/open access desk
120.500.12860/439932024-06-06T18:30:26Z

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