Browsing by author "Petersen Barbosa Lima, Lucas"
Now showing items 1-11 of 11
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Atomic layer deposition of Ta3N5
Dekkers, Harold; Van Elshocht, Sven; Petersen Barbosa Lima, Lucas (2013) -
B and Ga co-doping in epitaxial SiGe: challenges and opportunities
Porret, Clément; Rengo, Gianluca; Hikavyy, Andriy; Petersen Barbosa Lima, Lucas; Xie, Qi; Douhard, Bastien; Ayyad, Mustafa; Vantomme, André; Loo, Roger (2020) -
Characterization by GISAXS and electrochemical impedance spectroscopy of porous oxide films
Huanca, Danilo; Verdonck, Patrick; Dias, Carlos; Petersen Barbosa Lima, Lucas; Van Elshocht, Sven; dos Santos, Sebastiao; Witters, Thomas (2018) -
Epitaxial growth of Ga doped SiGe for reduction of contact resistance in finFET source/drain materials
Margetis, Joe; Kohen, David; Porret, Clément; Petersen Barbosa Lima, Lucas; Khazaka, Rami; Loo, Roger; Tolle, John (2019) -
Epitaxial growth of Ga-doped SiGe for reduction of contact resistance in finFET source/drain materials
Margetis, Joe; Kohen, David; Porret, Clément; Petersen Barbosa Lima, Lucas; Khazaka, Rami; Rengo, Gianluca; Loo, Roger; Tolle, John; Demos, Alex (2019-10) -
Exploration of BEOL line-space patterning options at 12nm half-pitch and below
Decoster, Stefan; Lazzarino, Frederic; Petersen Barbosa Lima, Lucas; Li, Waikin; Versluijs, Janko; Halder, Sandip; Mallik, Arindam; Murdoch, Gayle (2018) -
Ga-doped Ge and [B + Ga] Co-doped SiGe epitaxial source-drain for Sub-7 nm logic devices
Porret, Clément; Margetis, Joe; Tolle, John; Sammak, Amir; Scappucci, Giordano; Petersen Barbosa Lima, Lucas; Kohen, David; Kunert, Bernardette; Hikavyy, Andriy; Loo, Roger (2018) -
Gallium-doped SiGe and Ge via MO-RPCVD epitaxy
Margetis, Joe; Porret, Clément; Kumar, Raj; Petersen Barbosa Lima, Lucas; Kohen, David; Loo, Roger; Tolle, John (2018-05) -
Improving the electrical properties of epitaxial SiGe:B with excimer laser annealing treatments
Huang, Yan-Hua; Porret, Clément; Hikavyy, Andriy; Rengo, Gianluca; Petersen Barbosa Lima, Lucas; Khazaka, Rami; Kohen, David; Margetis, Joe; Tolle, John; Mazzamuto, Fulvio; Tabata, Toshiyuki; Heyns, Marc; Loo, Roger (2019) -
Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
Porret, Clément; Hikavyy, Andriy; Gomez Granados, Juan Fernando; Baudot, Sylvain; Vohra, Anurag; Kunert, Bernardette; Douhard, Bastien; Bogdanowicz, Janusz; Schaekers, Marc; Kohen, David; Margetis, Joe; Tolle, John; Petersen Barbosa Lima, Lucas; Sammak, Amir; Scappucci, Giordano; Rosseel, Erik; Langer, Robert; Loo, Roger (2018) -
Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
Porret, Clément; Vohra, Anurag; Hikavyy, Andriy; Rosseel, Erik; Huang, Yan-Hua; Tirrito, Matteo; Kohen, David; Margetis, Joe; Tolle, John; Petersen Barbosa Lima, Lucas; Khazaka, Rami; Langer, Robert; Loo, Roger (2019)