dc.contributor.author | Faramarzi, Vina | |
dc.contributor.author | de Poortere, Etienne | |
dc.contributor.author | Venugopalan, Syam Parayil | |
dc.contributor.author | Woltgens, Pieter | |
dc.contributor.author | Woo, Youngtag | |
dc.contributor.author | van de Kerkhof, Mark | |
dc.contributor.author | Kumar, Pawan | |
dc.contributor.author | Medina Silva, Henry | |
dc.contributor.author | Morin, Pierre | |
dc.contributor.author | Asselberghs, Inge | |
dc.contributor.author | Dorow, Chelsey | |
dc.contributor.author | O'Brien, Kevin | |
dc.contributor.author | Maxey, Kirby | |
dc.contributor.author | Avci, Uygar | |
dc.date.accessioned | 2024-08-19T15:08:03Z | |
dc.date.available | 2024-06-06T18:30:28Z | |
dc.date.available | 2024-08-19T15:08:03Z | |
dc.date.issued | 2024 | |
dc.identifier.isbn | 978-1-5106-7218-5 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:001222851800015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43996.2 | |
dc.source | WOS | |
dc.title | Advanced EUV patterning of 2D TMDs for CMOS integration | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Kumar, Pawan | |
dc.contributor.imecauthor | Morin, Pierre | |
dc.contributor.imecauthor | Asselberghs, Inge | |
dc.contributor.imecauthor | Medina Silva, Henry | |
dc.contributor.orcidimec | Kumar, Pawan::0000-0002-5764-2915 | |
dc.contributor.orcidimec | Morin, Pierre::0000-0002-4637-496X | |
dc.contributor.orcidimec | Asselberghs, Inge::0000-0001-8371-3222 | |
dc.contributor.orcidimec | Medina Silva, Henry::0000-0003-1461-5703 | |
dc.date.embargo | 2024-04-09 | |
dc.identifier.doi | 10.1117/12.3011818 | |
dc.identifier.eisbn | 978-1-5106-7219-2 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 129660I | |
dc.source.conference | Conference on Novel Patterning Technologies | |
dc.source.conferencedate | FEB 26-29, 2024 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12956 | |
imec.availability | Published - open access | |