Process Optimization of MP18 Semi-Damascene Interconnects with Fully Self-Aligned Vias at Sub-2nm Nodes

Publication:

2024

Proceedings Paper

Author(s)

Soussou, A.

;

;

;

;

Vincent, B.

Proceedings of SPIE

94 since deposited on 2024-06-06

Acq. date: 2026-01-10