Publication:
Improving OPC Model Accuracy of Dry Resist for Low k1 EUV Patterning
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Acq. date: 2026-10-08
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744 since deposited on 2024-06-15
17last month
8last week
Acq. date: 2026-10-08
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649 since deposited on 2024-06-15
Acq. date: 2026-10-08
Citations