Publication:
Improving OPC Model Accuracy of Dry Resist for Low k1 EUV Patterning
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Acq. date: 2026-04-28
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Downloads
690 since deposited on 2024-06-15
6last month
2last week
Acq. date: 2026-04-28
Views
647 since deposited on 2024-06-15
1last month
Acq. date: 2026-04-28
Citations