Publication:
The interface study of photoresist/underlayer using hybrid x-ray reflectivity and x-ray standing wave approach
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Acq. date: 2026-09-14
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426 since deposited on 2024-06-15
19last month
3last week
Acq. date: 2026-09-14
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622 since deposited on 2024-06-15
Acq. date: 2026-09-14
Citations