EISBN
978-1-5106-7217-8
ISBN
978-1-5106-7216-1
ISSN
0277-786X
Conference
Conference on Metrology, Inspection, and Process Control XXXVIII
Journal
Proceedings of SPIE
Volume
12955
Title
The interface study of photoresist/underlayer using hybrid x-ray reflectivity and x-ray standing wave approach
Publication type
Proceedings paper
Embargo date
2024-04-09