Publication:

Hotspot discovery and variability analysis for advanced EUV processes

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3011178
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Published version 1.2 MB

Author(s)

Sah, Kaushik
;
Chen, Zhijin
;
Zhang, Yao
;
Zhang, Liming
;
Zhang, Cao
;
Higgins, Craig
;
Burov, Anatoly
;
Parsey, Guy
;
Vukkadala, Pradeep
;
Gronheid, Roel
;
Jain, Arpit
;
Ramini, Ramakanth
;
Agrawal, Ankur
;
Sharma, Garima
;
Cross, Andrew
;
Roy, Syamashree  
;
Blanco, Victor  

Journal

Proceedings of SPIE

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561 since deposited on 2024-06-15
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667 since deposited on 2024-06-15
2last month
Acq. date: 2026-04-08

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