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Hotspot discovery and variability analysis for advanced EUV processes
Publication:
Hotspot discovery and variability analysis for advanced EUV processes
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Date
2024
Proceedings Paper
https://doi.org/10.1117/12.3011178
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sah, Kaushik
;
Chen, Zhijin
;
Zhang, Yao
;
Zhang, Liming
;
Zhang, Cao
;
Higgins, Craig
;
Burov, Anatoly
;
Parsey, Guy
;
Vukkadala, Pradeep
;
Gronheid, Roel
;
Jain, Arpit
;
Ramini, Ramakanth
;
Agrawal, Ankur
;
Sharma, Garima
;
Cross, Andrew
;
Roy, Syamashree
;
Blanco, Victor
Journal
Proceedings of SPIE
Abstract
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Downloads
378
since deposited on 2024-06-15
51
last month
14
last week
Acq. date: 2026-01-07
Views
659
since deposited on 2024-06-15
4
last month
1
last week
Acq. date: 2026-01-06
Citations