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Articles
Continued dimensional scaling through projection lithography
Publication:
Continued dimensional scaling through projection lithography
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Date
2024
Journal Article Review
https://doi.org/10.1016/j.mne.2024.100263
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5.52 MB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ronse, Kurt
Journal
MICRO AND NANO ENGINEERING
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417
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485
since deposited on 2024-07-16
Acq. date: 2025-12-16
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Metrics
Downloads
417
since deposited on 2024-07-16
41
last month
11
last week
Acq. date: 2025-12-16
Views
485
since deposited on 2024-07-16
Acq. date: 2025-12-16
Citations