Publication:

Metal Etch Depth Metrology using YieldStar and CDSEM

Date

2024

Proceedings Paper

https://doi.org/10.1109/ASMC61125.2024.10545490

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Author(s)

;

;

van Haren, Richard

;

Truffert, Vincent

;

;

Goossens, Danny

;

Tamaddon, Amir-Hossein

Journal

N/A

Metrics

145 since deposited on 2024-07-31

Acq. date: 2026-01-07