Publication:
Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing Applications
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432 since deposited on 2024-08-11
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Acq. date: 2026-08-06
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Views
432 since deposited on 2024-08-11
2last month
2last week
Acq. date: 2026-08-06
Citations