Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing Applications

Publication:

2024

Journal article

Author(s)

Tina, B.S.

;

Rohith, S.

;

Seena, V.

IEEE SENSORS JOURNAL

463 since deposited on 2024-08-11

20last month

3last week

Acq. date: 2026-10-10