Publication:
Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing Applications
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429 since deposited on 2024-08-11
3last month
Acq. date: 2026-02-25
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Statistics
Views
429 since deposited on 2024-08-11
3last month
Acq. date: 2026-02-25
Citations