Publication:
Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND
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427 since deposited on 2024-08-16
2last month
Acq. date: 2026-01-07
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Views
427 since deposited on 2024-08-16
2last month
Acq. date: 2026-01-07
Citations