Publication:

Multi-VT Options at Scaled Vertical Pitch in Gate-All-Around Nanosheet Devices by Independent Inner-Outer Work-function Tuning

Date

Loading...
Thumbnail Image

Abstract

Description

Metrics

Views

132 since deposited on 2024-09-14
1last month
Acq. date: 2026-01-06

Citations

Metrics

Views

132 since deposited on 2024-09-14
1last month
Acq. date: 2026-01-06

Citations