Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Deng, Kerong; Erofeev, Ivan; Chowdhuri, Angshuman Ray; Philipsen, Harold; Aabdin, Zainul; Hartanto, Antony Winata; Tjiu, Weng Weei; Zhang, Mingsheng; Fernando, Devshan; Saidov, Khakimjon; Kumar, Krishna; Pacco, Antoine; Holsteyns, Frank; Huynh, Han Vinh; Mirsaidov, Utkur

doi:10.1002/smll.202406713

Publication:

Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Date

2024

Journal article

https://doi.org/10.1002/smll.202406713

Simple item page Full metadata Statistics

Files

Published version 8 MB

Author(s)

Deng, Kerong

;

Erofeev, Ivan

;

Chowdhuri, Angshuman Ray

;

Philipsen, Harold

;

Aabdin, Zainul

;

Hartanto, Antony Winata

;

;

;

;

;

;

;

;

;

Journal

SMALL

Statistics

4 since deposited on 2024-10-30

Acq. date: 2026-05-17

308 since deposited on 2024-10-30

6last month

4last week

Acq. date: 2026-05-17

Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Downloads

Views

Citations

Statistics

Downloads

Views

Citations