Publication:

Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Date

2024
Journal article
https://doi.org/10.1002/smll.202406713
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Author(s)

Deng, Kerong
;
Erofeev, Ivan
;
Chowdhuri, Angshuman Ray
;
Philipsen, Harold  
;
Aabdin, Zainul
;
Hartanto, Antony Winata
;
Tjiu, Weng Weei
;
Zhang, Mingsheng
;
Fernando, Devshan
;
Saidov, Khakimjon
;
Kumar, Krishna
;
Pacco, Antoine  
;
Holsteyns, Frank  
;
Huynh, Han Vinh
;
Mirsaidov, Utkur

Journal

SMALL

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