Publication:

Selecting alternative metals for advanced interconnects

Date

2024-11-07
Journal article
https://doi.org/10.1063/5.0224027
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Author(s)

Soulie, Jean-Philippe  
;
Sankaran, Kiroubanand  
;
Van Troeye, Benoit  
;
Lesniewska, Alicja  
;
Varela Pedreira, Olalla  
;
Oprins, Herman  
;
Delie, Gilles  
;
Fleischmann, Claudia  
;
Boakes, Lizzie  
;
Rolin, Cedric  
;
Ragnarsson, Lars-Ake  
;
Croes, Kristof  
;
Park, Seongho  
;
Swerts, Johan  
;
Pourtois, Geoffrey  
;
Tokei, Zsolt  
;
Adelmann, Christoph  

Journal

Journal of Applied Physics

Abstract

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108 since deposited on 2024-11-04
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361 since deposited on 2024-11-04
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