Selecting alternative metals for advanced interconnects

Soulie, Jean-Philippe; Sankaran, Kiroubanand; Van Troeye, Benoit; Lesniewska, Alicja; Varela Pedreira, Olalla; Oprins, Herman; Delie, Gilles; Fleischmann, Claudia; Boakes, Lizzie; Rolin, Cedric; Ragnarsson, Lars-Ake; Croes, Kristof; Park, Seongho; Swerts, Johan; Pourtois, Geoffrey; Tokei, Zsolt; Adelmann, Christoph

doi:10.1063/5.0224027

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Selecting alternative metals for advanced interconnects

Date

2024

Journal article

https://doi.org/10.1063/5.0224027

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Author(s)

Soulie, Jean-Philippe

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Sankaran, Kiroubanand

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Van Troeye, Benoit

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Lesniewska, Alicja

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Varela Pedreira, Olalla

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Journal of Applied Physics

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Selecting alternative metals for advanced interconnects

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