Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

Erofeev, Ivan; Hartanto, Antony Winata; Khan, Muhaimin Mareum; Deng, Kerong; Kumar, Krishna; Aabdin, Zainul; Tjiu, Weng Weei; Zhang, Mingsheng; Pacco, Antoine; Philipsen, Harold; Chowdhuri, Angshuman Ray; Huynh, Han Vinh; Holsteyns, Frank; Mirsaidov, Utkur

doi:10.1002/admi.202400558

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Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

Date

2025

Journal article

https://doi.org/10.1002/admi.202400558

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Author(s)

Erofeev, Ivan

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Hartanto, Antony Winata

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Khan, Muhaimin Mareum

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Chowdhuri, Angshuman Ray

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Huynh, Han Vinh

;

Holsteyns, Frank

;

Mirsaidov, Utkur

Journal

ADVANCED MATERIALS INTERFACES

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515 since deposited on 2024-11-26

Acq. date: 2026-06-24

248 since deposited on 2024-11-26

Acq. date: 2026-06-24

Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

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