Publication:

Transfer of a high temperature LPCVD-SiN photonic layer on wafers with thermal budget limitations

Date

2024
Proceedings Paper
https://doi.org/10.1109/omn61224.2024.10685248
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Author(s)

Pham, Nga  
;
O'Callaghan, John  
;
Thanjavur Prakasam, Vittal  
;
Neutens, Pieter  
;
Ceuppens, Joris  
;
Visker, Jakob  
;
Zhou, Di  
;
Helin, Philippe  

Journal

N/A

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134 since deposited on 2024-12-04
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Acq. date: 2026-08-04

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134 since deposited on 2024-12-04
2last month
Acq. date: 2026-08-04

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