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Conference contributions
Multi-tier die stacking through collective die-to-wafer hybrid bonding.
Publication:
Multi-tier die stacking through collective die-to-wafer hybrid bonding.
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Date
2024
Proceedings Paper
https://doi.org/10.1109/ECTC51529.2024.00106
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kennes, Koen
;
Lin, Ye
;
Suhard, Samuel
;
Bex, Pieter
;
Cuypers, Dieter H.
;
Guerrero, Alice
;
Bumueller, Dennis
;
Phommahaxay, Alain
;
Beyer, Gerald
;
Beyne, Eric
Journal
N/A
Abstract
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243
since deposited on 2024-12-07
Acq. date: 2025-12-11
Citations
Metrics
Views
243
since deposited on 2024-12-07
Acq. date: 2025-12-11
Citations