Publication:
Rectification of extreme ultraviolet lithography patterns by directed self-assembly: a roughness and defectivity study
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133 since deposited on 2025-01-09
6last month
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Acq. date: 2026-08-11
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Statistics
Views
133 since deposited on 2025-01-09
6last month
1last week
Acq. date: 2026-08-11
Citations