Publication:

Rectification of extreme ultraviolet lithography patterns by directed self-assembly: a roughness and defectivity study

Date

2024
Journal article
https://doi.org/10.1117/1.JMM.23.4.043001
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Author(s)

Van Bel, Julie  
;
Verstraete, Lander  
;
Suh, Hyo Seon  
;
Bezard, Philippe  
;
Moussa, Alain  
;
Santos, Andreia
;
Her, Youngjun
;
De Gendt, Stefan  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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126 since deposited on 2025-01-09
3last month
Acq. date: 2026-04-27

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126 since deposited on 2025-01-09
3last month
Acq. date: 2026-04-27

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