Publication:
Rectification of extreme ultraviolet lithography patterns by directed self-assembly: a roughness and defectivity study
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160 since deposited on 2025-01-09
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Acq. date: 2026-09-16
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Statistics
Views
160 since deposited on 2025-01-09
25last month
6last week
Acq. date: 2026-09-16
Citations