Publication:
Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron-Ion Coincidence Experiments
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270 since deposited on 2025-01-20
5last month
Acq. date: 2026-02-25
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Statistics
Views
270 since deposited on 2025-01-20
5last month
Acq. date: 2026-02-25
Citations