Publication:

Scatterometry Application on Cu/SiCN surface topography towards high volume manufacturing

Date

2024
Proceedings Paper
https://doi.org/10.1109/ESTC60143.2024.10712071
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Author(s)

Chew, Soon Aik  
;
Hung, Joey
;
Turovets, Igor
;
Saib, Mohamed  
;
Ger, Avron
;
Moussa, Alain  
;
Zhang, Boyao  
;
De Vos, Joeri  
;
Miller, Andy  
;
Charley, Anne-Laure  
;
Leray, Philippe  
;
Beyne, Eric  

Journal

N/A

Abstract

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247 since deposited on 2025-02-15
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Acq. date: 2025-12-11

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247 since deposited on 2025-02-15
2last month
Acq. date: 2025-12-11

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