Publication:

Characterization of Siliconcarbonitride bonding layer for plasma activated direct fusion bonding

Date

2024

Proceedings Paper

https://doi.org/10.1109/IITC61274.2024.10732483

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Author(s)

Doppelbauer, David

;

Floetgen, Christoph

;

Gabas, Ignacio Gabriel Vicente

;

;

;

;

Duchoslav, Jiri

;

Journal

N/A

Statistics

258 since deposited on 2025-03-06

Acq. date: 2026-02-26