Publication:

Airgap Integration in MP18 Two-Level Semi-damascene Interconnects with Fully Self-aligned Vias

Date

2024
Proceedings Paper
https://doi.org/10.1109/iitc61274.2024.10732649
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Author(s)

Delie, Gilles  
;
Murdoch, Gayle  
;
Marti, Giulio  
;
Gupta, Anshul  
;
Wu, Chen  
;
Lesniewska, Alicja  
;
Gavrilov, Anton  
;
Ciofi, Ivan  
;
Kundu, Souvik  
;
Decoster, Stefan  
;
Park, Seongho  
;
Tokei, Zsolt  

Journal

N/A

Abstract

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226 since deposited on 2025-03-06
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226 since deposited on 2025-03-06
1last month
Acq. date: 2026-09-20

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