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Airgap Integration in MP18 Two-Level Semi-damascene Interconnects with Fully Self-aligned Vias

dc.contributor.authorDelie, Gilles
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorMarti, Giulio
dc.contributor.authorGupta, Anshul
dc.contributor.authorWu, Chen
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorGavrilov, Anton
dc.contributor.authorCiofi, Ivan
dc.contributor.authorKundu, Souvik
dc.contributor.authorDecoster, Stefan
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2025-06-05T09:53:20Z
dc.date.available2025-03-06T20:46:36Z
dc.date.available2025-06-05T09:53:20Z
dc.date.issued2024
dc.identifier.isbn979-8-3503-8518-2
dc.identifier.issn2380-632X
dc.identifier.otherWOS:001411360600047
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45337.2
dc.sourceWOS
dc.titleAirgap Integration in MP18 Two-Level Semi-damascene Interconnects with Fully Self-aligned Vias
dc.typeProceedings paper
dc.contributor.imecauthorDelie, Gilles
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorMarti, Giulio
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorGavrilov, Anton
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorKundu, Souvik
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecDelie, Gilles::0000-0002-5646-3261
dc.contributor.orcidimecMurdoch, Gayle::0000-0002-6833-220X
dc.contributor.orcidimecGupta, Anshul::0000-0003-4276-5397
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecGavrilov, Anton::0009-0009-1833-3368
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecKundu, Souvik::0000-0001-5815-8765
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecPark, Seongho::0000-0002-1058-9424
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.identifier.doi10.1109/IITC61274.2024.10732649
dc.identifier.eisbn979-8-3503-8517-5
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conference2024 International Interconnect Technology Conference
dc.source.conferencedateJUN 03-06, 2024
dc.source.conferencelocationSan Jose
dc.source.journalN/A
imec.availabilityPublished - imec


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220.500.12860/45337.2*2025-06-05T09:52:18Zvalidation by library/open access desk
120.500.12860/453372025-03-06T20:46:36Z

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