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Self-aligned 8nm T2T as cell boundary in the middle-of-line
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Self-aligned 8nm T2T as cell boundary in the middle-of-line
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Date
2024
Proceedings Paper
https://doi.org/10.1109/IITC61274.2024.10732381
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Marien, Philippe
;
Hermans, Yannick
;
Choudhury, Subhobroto
;
Kundu, Shreya
;
Decoster, Stefan
;
Ulu Okudur, Fulya
;
Reddy, Naveen
;
Kenens, Bart
;
Jourdan, Nicolas
;
Delie, Gilles
;
Marti, Giulio
;
Wu, C.
;
Vega Gonzalez, Victor
;
Murdoch, Gayle
;
Park, Seongho
;
Tokei, Zsolt
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Views
182
since deposited on 2025-03-06
2
last month
1
last week
Acq. date: 2026-01-07
Citations