Publication:
Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options
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173 since deposited on 2025-03-06
6last month
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Acq. date: 2025-12-10
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Metrics
Views
173 since deposited on 2025-03-06
6last month
1last week
Acq. date: 2025-12-10
Citations