Publication:
Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options
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174 since deposited on 2025-03-06
2last month
Acq. date: 2026-01-07
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Metrics
Views
174 since deposited on 2025-03-06
2last month
Acq. date: 2026-01-07
Citations