Publication:

Optimized thermal processing for Ti-capped CoSi2 for 0.13μm technology

Date

2000

Presentation

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Author(s)

Lindsay, Richard

;

Lauwers, A.

;

de Potter de ten Broeck, Muriel

;

Roelandts, Nico

;

Vrancken, Christa

;

Statistics

1962 since deposited on 2021-10-14

Acq. date: 2026-04-06