Publication:
Optimized thermal processing for Ti-capped CoSi2 for 0.13μm technology
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1959 since deposited on 2021-10-14
2last month
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Acq. date: 2025-12-08
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1959 since deposited on 2021-10-14
2last month
1last week
Acq. date: 2025-12-08
Citations