Authors

Lindsay, Richard; Lauwers, A.; de Potter de ten Broeck, Muriel; Roelandts, Nico; Vrancken, Christa; Maex, Karen

Conference

Materials for Advanced Metallization Conference - MAM; February 28 - March 1, 2000; Stresa, Italy.

Title

Optimized thermal processing for Ti-capped CoSi2 for 0.13μm technology

Publication type

Oral presentation